Nanotech 2011

Design and Characterization of a Fully Differential Mems Accelerometer Fabricated Using METALMUMPS Technology

P. Qu
Oakland University, US

Keywords: MEMS, accelerometer, MetalMUMPS, fully differential

Abstract:

As an exploratory study, this paper presents a fully differential single-axis accelerometer fabricated using MetalMUMPS process. The unique common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. The wet releasing process of the sensor allows for high yield, good process consistency. Possible low manufacturing cost of the MEMS elements can be expected if wafer-level fabrication, package and dicing services are requested.
 

TechConnect World 2011 Nanotech 2011 Clean Technology 2011 Microtech 2011 BioNanotech 2011 TechConnect Summit 2011
Program | Tracks | Exhibition | Press | Venue | Register |
Symposia | Short Courses | News | Subscribe | Contact | Site Map
© Copyright 2010 TechConnect World. All Rights Reserved.