Nanotech 2011

Integration Challenges for High Performance Inertial Sensors (invited presentation)

R. Scannell
Analog Devices, Inc., US

Keywords: MEMS

Abstract:

A substantial integration gap exists between high volume consumer MEMS inertial sensors and high performance industrial/military MEMS inertial sensors. Applications such as precision navigation and industrial instrumentation are among the most demanding and stressful in terms of inertial MEMS device performance. In such applications, the level of design complexity greatly increases along with the associated sensor processing surrounding the MEMS device. MEMS gyros and accelerometers, for example, will be subjected to significantly more stress requiring exceptional drift rate specifications. This in turn leads to challenges in test, calibration, and the integration of the signal processing. This presentation will discuss these challenges and the related trade-offs in integration/partitioning/performance.
 

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