Nanotech 2011

The SEM/FIB Workbench: Automated Nanorobotics System Inside of Scanning Electron or Focussed Ion Beam Microscopes

V. Klocke, I. Burkart, R. Kaufmann
Klocke Nanotechnik GmbH, DE

Keywords: nanorobotics, NanoFab, SEM/FIB workbench, nanomanipulation, nanofabrication


With light microscopes it is natural for everybody to use manual or automatic toolsets like tweezers, knives, hooks, probes and several different measurement tools. The operators of SEM, FIB or Dual Beam systems generally work without toolsets and call it natural, although the wavelength limit of light is no physical boundary for using such tools. The SEM/FIB Workbench developed by Klocke Nanotechnik closes this gap and offers for the first time an easy to use system for in-situ Nanomanipulation, object handling, material preparation and processing, assembly and manufacturing including new methods for nano-characterization in SEM/FIB systems.

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