Nanotech 2010
Luigi Colombo

Luigi Colombo

Fellow, External Research Development Group

Texas Instruments Incorporated

Luigi Colombo is a TI Fellow in the External Research Development group at Texas Instruments. He received a B.S. in Physics from Iona College in 1975 and a Ph.D. in Materials Science from the University or Rochester in 1980. He joined TI in 1981 to work on infrared detector materials until 1995. Over this period he developed a HgCdZnTe liquid phase epitaxy process which he also put in production. This process is still production today providing material for many DoD applications. Since then he has been responsible for the development of high-k capacitor MIM structures for DRAMs, development of high-k gate/metal gate transistor gate stack using Hf-based dielectrics, and low leakage SiON based 45 nm transistor gate stack development. He is currently responsible for the development of new materials such as graphene and their integration in new device flows for beyond CMOS device technology as part of the Nanoelectronics Research Initiative. Dr. Colombo has authored and co-authored over 120 refereed papers, made over 110 invited and contributed presentations, has written 3 chapters in edited books, and holds 70 US and 18 international patents. He has been the Chairman of the IRIS Materials Specialty Group Meeting for 2 years, has organized, chaired and co-chaired numerous technical conferences.
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