Nanotech 2010

Advances in Helium Ion Microscopy for High Resolution Imaging and Material Modification

W. Thompson, J. Notte, L. Scipioni, M. Ananth, L. Stern, S. Sijbrandij, C. Sanford
Carl Zeiss SMT, US

Keywords: helium ion microscopy, sub-nanometer image resolution, graphene, soft materials collagen fibers


The helium ion microscope routinely obtains sub-nanometer resolution on uncoated soft materials with a high signal to damage ratio. In addition to its high resolution imaging capability, the microscope has been successful at sub-nanometer film thickness determination, the patterning of 5 nm free standing graphene wires and the ion induced deposition of a 30nm, 6 micron high, free standing tungsten pillar. We will discuss the microscope and these various recent applications.
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