Nanotech 2010

Soft plasma polymer coatings based on atomic polymerization

V. Cech, R. Trivedi, S. Lichovnikova, L. Hoferek
Brno University of Technology, CZ

Keywords: plasma, thin film, nanostructure


Plasma polymerization is a thin film-forming process based on atomic polymerization. Plasma polymer films deposited from organosilicon monomers constitute a special class of dielectric coatings with controllable organic/inorganic character and cross-linking that enable optimization of their dielectric, optical, mechanical, and surface properties. Next progress was aimed at construction of functionally nanostructured films in a form of multilayers, with sharp of diffusive interfaces, and gradient coatings of physicochemical properties continuously varying from material A to material B.
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