Nanotech 2010

Synthesis and Characterization of Al- and Ni-doped ZnO by Sol-gel Method

Y.C. Liu
Chang Gung University, TW

Keywords: sol-gel, ZnO, AZO, NZO


Zinc oxide (ZnO), aluminum doped zinc oxide (AZO) and nickel doped zinc oxide (NZO) nanoparticles were synthesized by sol-gel process. When the precursors containing 1at% and 2 at% Al, we calculate the actual doped percentage number were 0.9 at% and 1.7at% by XPS technique. For NZO precusor containing 2 at% Ni, the measured Ni content of the coated film was 1.8 at% by Ni 2p3/2 of XPS data. Finally, the measured resistivities of the AZO (1.7 at% Al) prepared at 550 ℃and NZO (1.8 at% Ni) prepared at 500 ℃ were 0.56 Ωcm and 0.74 Ωcm, repsectively.
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