Nanotech 2010

Gas phase synthesis of silica nanoparticles in a hybrid microwave-plasma hot-wall reactor

A. Abdali, B. Moritz, H. Wiggers, C. Schulz
University of Duisburg-Essen, DE

Keywords: silica, nanoparticles, plasma, gas phase, particle growth


A microwave plasma reactor was constructed for gas phase synthesis of silica nanoparticles from tetraethoxysilane and a subsequent hot-wall furnace was used to enable for different temperature/time profiles. This combination has enabled us to investigate the growth of silica particles in detail. Particle properties such as size, size distribution, shape, morphology, and agglomeration were investigated via transmission electron microscopy (TEM). The samples were collected on TEM grids in-situ from the reactor and ex-situ from a filter device. The particles collected directly from the gas flow are non-agglomerated and have a spherical morphology. However, those obtained from the filter are spherical in shape but have a high degree of agglomeration.
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