Nanotech 2010

Imaging three-dimensional microstructures fabricated by two-photon polymerization using CARS microscopy

T. Baldacchini
Newport Corporation, US

Keywords: two-photon polymeryzation, ultrafast lasers, nonlinear optical microscopy


Two-photon polymerization (TPP) is an enabling technology that allows fast prototyping of parts with sub-100 nm resolution. Due to its ability to fabricate microstructures with arbitrary three-dimensional geometries, TPP has been employed in diverse fields such as nanophotonics, microelectronics, microelectromechanical systems, and microfluidics. However, no information is available to date that microscopically correlates the experimental conditions used in TPP with the properties of the ultimate microstructure. We present a study where the distribution of polymer cross-linking in three-dimensional microstructures fabricated by TPP is visualized by means of coherent anti-Stokes Raman scattering (CARS) microscopy. The characterization of the microstructures based on the acquired images permits rational optimization of the TPP process
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