Nanotech 2010

Fabrication and assembly of nanowrinkle patterns on metallic surface: a nonlithography method for nano fabrication

Z. Zhang, C. Guo, Q. Liu
National Center for Nanoscience and Technology, China, CN

Keywords: nanowrinkle, metallic surface, nano fabrication


Ordered periodic nanostructures have shown its great importance in both fundamental research and practical use. Motivated by wrinkles, which are ubiquitous in nature, artificial patterns with micro periods were fabricated in stiff/soft bilayer. Compare to traditional lithography method, the fabrication by wrinkling is inexpensive, simple and convenient for periodic structures. Although the nanoscale period wrinkle patterns have been achieved on polymer surface, a nanowrinkle pattern on metal film has wide applications owing to its electronic, optical, and thermal properties.In this paper, the wrinkle patterns with periods from micro- to nano-scale (sub 500nm) were fabricated on metal surface by choosing the appropriate metal film and optimizing the film thicknesses. The influence of metal film morphology on wrinkle pattern was studied, which is seldom mentioned in existing works. Furthermore, the wrinkle patterns were assembled by the prefabricated structures produced via nanoimprint, deposition with masks and laser scanning. Our research result shows that the wrinkling of metal/polymer bilayer is a potential nano fabrication method combining conventional bottom-up with top-down nanofabricating technique.
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