Nanotech 2010

Development of Aligned Carbon Nanotubes (CNTs) for Pressure Sensing Application

N.M. Mohamed, M.K. Lai, K.M. Begam
University Technology PETRONAS, MY

Keywords: aligned carbon nanotubes, piezoresistance, chemical vapor deposition


The paper reports on the investigation of using aligned carbon nanotubes (CNTs) as the pressure sensing element. Besides the unique advantages of high sensitivity, small size, low power consumption, and strong mechanical stability, the driving factor for developing CNTs-based pressure sensor is the thermal stability. Unlike the conventional Si-based pressure sensors which have maximum operating temperature of 120oC, CNT based pressure sensor can be operated up to 250oC. The sensor configuration was set up for testing in order to establish the working principle of the nanotube-based pressure sensor
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