Nanotech 2010

Evaluation of Uncertainty in Nanoparticle Size Measurement by Differential Mobility Analysis

C.M. Lin, T.C. Yu, S.H. Lai, H.C. Ho, H.F. Weng, S.H. Wang, C.J. Chen
Center for Measurement Standards, Industrial Technology Research Institute, TW

Keywords: nanoparticle size, measurement uncertainty, differential mobility analysis


This paper presents the measurement results and the uncertainty analysis for four batches of polystyrene latex (PSL) spheres with nominal sizes of 20 nm, 100 nm, 300 nm and 500 nm using the measurement system which differential mobility analysis (DMA) method is applied. The possible error sources are evaluated based on the DMA method and the measurement procedures. The resulting expanded uncertainties are 1.3 nm for the 20 nm particles and 13 nm for the 500 nm particles at 95% confidence interval.
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