Nanotech 2010

Large-scale synthesis of carbon coils using SF6 gas flow injection under thermal chemical vapor deposition system

J-H Eum, S-H Kim, R. Balakrishnaiah, S.S. Yi, K. Jang
Silla University, KR

Keywords: carbon coils, chemical vapor deposition, gas phase cycling

Abstract:

Carbon coils could be synthesized using C2H2/H2 as source gases and SF6 as an incorporated additive gas under thermal chemical vapor deposition system. Nickel catalyst layer deposition and then hydrogen plasma pretreatment were performed prior to the carbon coils deposition reaction. The injection time of SF6 gas flow and the number of the gas phase cycling were varied according to the different reaction processes. To achieve the dominant formation of the controlled-geometry for carbon coils, the source gases and SF6 were manipulated as the gas phase cycling on/off modulation of C2H2/H2/SF6 flow during the initial deposition stage. The formation density, morphology, and geometry characteristics of the deposited carbon coils on the substrate were investigated according to the different reaction processes. Finally, the dominant formation of the controlled-geometry for carbon coils could be achieved by adjusting the number of the gas phase cycling. The sulfur role for the formation of carbon coils and the enhanced etching ability by the fluorine-related species were considered to be the main cause for achieving the dominant formation of the controlled-geometry for carbon coils.
 
Program | Speaker Exhibitor | Press | Venue Register |
Symposia | Short Courses | News | Subscribe | Contact | Site Map
© Copyright 2009 TechConnect World. All Rights Reserved.