Nanotech 2010

Vertical growth of ZnO nanowire arrays on ITO glass substrate

E.J. Yoo, G.U. Choi, E.L. Shim, S.H. Kim, C.J. Kang, Y.J. Choi
Myoung Ji University, KR

Keywords: ZnO, nanowire, ITO, vertical growth


Zinc oxide nanowires (NWs) are important II-VI compound semiconductor NWs with a direct wide band gap of 3.4 eV, a large exciton binding energy of 60 meV at room temperature . Well-controlled growth of the ZnO NWs on various substrates would make their various applications available. For example, growth of ZnO NWs on an indium tin oxide (ITO) glass substrate could find useful optoelectronic applications in field emission displays and solar cells. ITO glass would be one of the best substrates for the optoelectronic applications because it has high conductivity and transparency. For high-efficient electron emission, it remains a significant challenge to control the growth of well-ordered and vertical nanoarrays on ITO glass substrate, which requires low-temperature growth of ZnO nanoarrays. In the present work, we report the control of growth direction of ZnO NWs on glass substrate by using sputtered ZnO seed layer. ZnO film of 2000 Å was deposited on the substrate using a RF magnetron sputter at 200°C, and ZnO NWs were grown by using hydrothermal method at 75 °C. The scanning electron microscopy(SEM) measurements of grown ZnO NWs on the substrate with and without ZnO seed layers show that ZnO NWs on ZnO seeded ITO glass substrates are grown more vertically than those on bare ITO substrate.
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