Nanotech 2010

Practical issues with ion beam milling in acoustic resonator technologies

S. Mishin, Y. Oshmyansky, F. Bi
Advanced Modular Systems, Inc, US

Keywords: FBAR, trimming, ion milling, SiO2, AlN


A practical approach to addressing production issues of thickness trimming was demonstrated through two-step trimming, send-ahead wafer, and deposition/trimming cluster tool. Thickness control necessary in SAW/BAW technology was demonstrated.
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