Nanotech 2010

Influence of moisture on humidity sensitive material parameters of microelectonic relevant polymers

H. Walter, E. Dermitzaki, B. Wunderle, B. Michel
Fraunhofer IZM, DE

Keywords: visco elastic, moisture polymers, small dimension, hygroscopic swelling

Abstract:

This paper presents various modified measurement methods for analysis the effect of moisture of thermo-mechanical properties of MEMS relevant polymer systems. It was developed an advanced measurement method, modified DMA multifrequency and hygroscopic swell analysis, for the determination of moisture dependent parameters for micro and nano scale samples. The authors found empirical constants to describe the experimental data by means of WLF equation. The water molecules seem to weaken the intermolecular forces for the polymers to prefer the state of entropy elasticity already to lower temperature, and the moisture shows influences on the visco elastic properties significantly.Diffusion in highly filled epoxies does not follow the conventional Fickian diffusion of polymers. Modified non-Fickian absorption models were used.In combination with numerical methods new strategies for life time evaluation and fatigue of microelectronic packaging, MEMS and NEMS can be addressed.
 
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