Nanotech 2010

Fabrication of Nanoporous Ultrananocrystalline Diamond Membranes

O.V. Makarova, R. Divan, N. Moldovan, C.-M. Tang
Creatv MicroTech, Inc, US

Keywords: nanocrystalline diamond, nanoporous membranes, e-beam lithography, RIE


Nanoporous membranes engineered to mimic natural filtration systems can be used in smart implantable drug delivery systems, bioartificial organs, and other novel nano-enabled medical devices. The ultrananocrystalline diamond (UNCD) porous membranes will open new opportunities in implant medicine because of the highest, unmatched by other materials degree of biocompatibility and anti-biofouling. We report our results on high porosity high-aspect-ratio UNCD membranes fabricated using e-beam lithography, reactive ion etching and laser writing.
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