Microtech 2011

Correlation of Microstructure and Tribological Properties of Dry Sliding Nanocrystalline Diamond Coatings

M. Wiora, N. Sadrifar, K. Brühne, P. Gluche, H.-J. Fecht
Ulm University, DE

Keywords: nanocrystalline diamond, tribology, friction, wear, running-in, reliability


Nanocrystalline diamond (NCD) offers great potential for many micro-mechanical systems, particularly where low friction, reliability and mechanical integrity are of great importance. The reduction of grain size in NCD films to several nanometers is, however, accompanied by a significant change in morphological, chemical, mechanical and especially tribological properties. The evaluation of the friction and wear behavior, including the running-in-period and steady-state friction is necessary before designing NCD-coated micro-mechanical components for which reliability, wear resistance and long lifetime are crucial issues. This work shows a correlation of microstructure and tribological properties in nanocrystalline diamond films.

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