Microtech 2011

Design and Characterization of a Fully Differential Mems Accelerometer Fabricated Using METALMUMPS Technology

P. Qu
Oakland University, US

Keywords: MEMS, accelerometer, MetalMUMPS, fully differential


As an exploratory study, this paper presents a fully differential single-axis accelerometer fabricated using MetalMUMPS process. The unique common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. The wet releasing process of the sensor allows for high yield, good process consistency. Possible low manufacturing cost of the MEMS elements can be expected if wafer-level fabrication, package and dicing services are requested.

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