Microtech 2011

Accommodation coefficient investigation in rectangular micro-channels for large Knudsen number range

M. Hadj Nacer, I. Graur, P. Perrier
Université de Provence, FR

Keywords: gas flows, mass flow rate, pressure measurements, accommodation coefficient


Experimental and numerical investigations on the flow through rectangular microchannel are presented. The constant volume technique was used to measure the mass flow rate through rectangular microchannel which had gold deposits on the interior surfaces. The aim of this work is the determination of the accommodation coefficient by comparing the experimental results to analytical calculations in the hydrodynamic and slip regimes, and to calculations based on the numerical solution of the model kinetic equation in the transitional regime.

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