Microtech 2011


Z. Zhao, Y. Han, L. Du, Z. Fang, X. Wang
Institute of Electronics,CAS, CN

Keywords: comb finger, micro wind sensor


This paper reports a novel micro wind sensor with comb finger shaped structure based on MEMS technology and capacitive sensing principle, which can measure wind speed and direction simultaneously. The proposed sensor was theoretically analyzed based on fluid mechanics theory and simulated by FEA software ANSYS. The fabrication processes based on Si-Glass anodic bonding and DRIE technology were designed and experiments were carried out to research how sensor structure released. The sensor was fabricated with the size of 1cm×1cm and packaged on a PCB board and tested in a wind tunnel. The test result shows that the sensor can realize wind speed measurement and is sensitive to wind direction.

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