Microtech 2011

Low cost production of single crystal-like films

Organization:ETH Zurich - ETH transfer, Zurich, CH
I.P. Brief:Low energy ion irradiation of thin films results in nanocrystal formation with the same crystallographic orientation through a selective sputtering process. Those will act as seeds for subsequent deposition resulting in an increased biaxial texture of the film. Repetition of irradiation and deposition leads to single crystal-like films.
Keywords:Thin metal film, Biaxial texture, Single crystals, Magnetron sputter deposition, Ion bombardment, Material reliability, Electromigration resistant materials, CMOS
Primary Industry:Sensors & Microsystems

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