Microtech 2011

Low-cost Thin-film Transistor-based Microcantilever for Measuring Deflection

P-Y Lin, Y-J Cheng, S. Kuan and L-S. Huang
National Tainwan University, TW

Keywords: microcantilever, TFT, surface stress, sensors


Here, we firstly report the low-cost poly-Si TFT embedded in the high-stress region of the microcantilever (MCL) as a sensing transducer to convert local strain into an electrical signal.In this work, the verification of reproducible change in drain current confirms the feasibility of TFT-based MCLs for monitoring deflection at the sensitivity of 40 nA/μm.

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