Microtech 2011

Control of MEMS-Technology Axial Topology MicroServos

S.E. Lyshevski
Rochester Institute of Technology, US

Keywords: MEMS, axial topology microservos, microsystems, microactuators


Concurrent microsystems design, optimization, data-intensive analysis and hardware-software co-design of digital high-performance microelectromechanical systems (MEMS) have become major challenging themes. The major goal of this paper is to report-and-apply viable methodologies for design–and–implementation of MEMS hardware, microscale axial topology actuator developments, control system design, testing, and, characterization. We examined a miniscale servosystem with axial-topology high-torque density actuators with SmCo permanent-magnet strip arrays. This servo must guarantee high-precision with imposed requirements and specification on the dynamic performance, such as stability, robustness, settling time, overshoot, etc.

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