Microtech 2011

Weak Magnetic Fields Sensing Using Soft Ferrite Nanoparticles and MEMS

S.E. Lyshevski
Rochester Institute of Technology, US

Keywords: magnetic field, sensing, ferrite nanoparticles, MEMS


We perform the feasibility analysis of sensing weak magnetic fields by using soft ferrite nanoparticles embedded in molecular complexes. The sensing mechanisms are based on the deflection of molecular complexes and induced strain due to the varying magnetic force. The proposed premise can be relevant in analysis of sensing weak magnetic fields in biological systems. The feasibility analysis of proof-of-concept solid (silicon) and hybrid microdevices are documented. The fabrication of various soft ferrites are reported.

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