Microtech 2011

Comparaison between PDMS and PMMA for MEMS applications

H. Bourbaba, C. Benachaiba, M. Bouanini
University of Bechar, DZ

Keywords: membrane, MEMS, PDMS, PMMA, elastometer


The elastometer applications for MEMS are recent technology, in this article we modeling PDMS membrane and PMMA membrane subjected to pressure force for microvalve applications.

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