Microtech 2011

Improving Performance of Micro Structure and MEMS Designs by using Optical Measurement (invited presentation)

E.M. Lawrence
Polytec Inc., US

Keywords: MEMS


Micro Electrical Mechanical Systems (MEMS) usually involve moving elements for sensing and actuation. Electrical tests provide basic functionality tests, but do not determine the exact mechanical behavior of devices. Therefore, an optical technique is required to provide sensitive, real-time response measurements of MEMS. The Micro System Analyzer provides such a unique capability for measurement of MEMS dynamic response and topography. This features laser Doppler vibrometry (LDV) measurements of out-of-plane motion with a

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