Microtech 2011

SUGARX: an Online Tool That Bridges the Gap Between Experiment and Simulation

P. Marepalli, F. Li, J.V. Clark
Purdue University, US

Keywords: MEMS design and test cycle, self-calibration, electro micro metrology

Abstract:

We present a pioneering online tool called SugarX that, for the first time, bridges the gap between experiment and simulation. Our tool is available online at nanoHUB.org with remote experimental control and simulation. A web browser on a computer or smartphone is all that is required to use SugarX to remotely control an experiment on a Micro Electro Mechanical System (MEMS). In SugarX, both the true device and computer model share the same electromechanical structural properties. This is achieved using a technique called electro micro metrology (EMM) to extract actual device properties and substitute them in computer model. Ideally, the true device and its model share the same performances when the same voltages are applied, unless there is unaccounted phenomena present. In the present case, the user is able to detect and model both the Casimir force and van der Waals force in a MEMS. The current framework of SugarX may also be used to achieve experimentally accurate models.
 

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