Microtech 2011

Superhydrophobic porous silicon surfaces

G. Bolognesi
University of Roma “La Sapienza”, IT

Keywords: superhydrophobic, porous silicon


In this paper, we present a novel inexpensive technique to produce superhydrophobic surfaces from porous silicon. Superhydrophobic surfaces are a key technology for their ability to reduce friction losses in microchannels and their self cleaning properties. P-type silicon wafer was processed in a wet environment to produce macropores with controlled size and distribution and coated with a n-alkysilane self assembled monolayer. Large contact angles and low contact angle hysteresis are observed on such surfaces, allowing for significant reduction of friction at solid walls. The porous silicon morphology, that is, pore size and porosity, is parametrically varied in order to identify parameters that optimize the hydrophobicity of the surface. This technique represents a cost-effective means for friction reduction in microfluidic applications, such as lab-on-a-chip. In addition, a silicon based technology is easily integrated with electronic components.

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