Microtech 2011

Fabrication of Nano-structures of NiTi Shape Memory Films and Investigations on Size dependence of their Mechanical Properties

S.K. Sharma, S. Mohan
Indian Institute of Science, Bangalore, IN

Keywords: shape memory alloys (SMA), magnetron sputtering, focused ion beam (FIB) micro-machining, scanning electron microscopy, nano-mechanical testing


Focused Ion Beam (FIB) micro-machining technique has been used to generate various nano-structures on NiTi shape memory alloy films. The fabrication and nano-mechanical investigations of the nano-structures have been included in this paper.

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