| MEMS Fab: Design, Manufacture, Instrumentation: |
MEMS Processes, CMOS Integration, Metrology, Processes, Services, Tools & Equipment |
| NanoFab: Manufacture & Instrumentation: |
Novel Materials, Devices, Processes, Structures & Instrumentation |
| Computational Methods, Simulation, Software Tools: |
MEMS Modeling (MSM), Nano Device & Material Modeling (ICCN), Methods & Tools |
| Workshop on Compact Modeling (WCM): |
Intrinsic, Extrinsic, Atomic/Quantum, Statistical Models & Extraction |
| Micro & Nano Reliability: |
MEMS, NEMS, Electronics, Sensors, Simulation, Design, Testing, Materials, Standards |
