Microtech2010 2010

Novel ultra-fine hollow needles formed on Silicon membranes

Z. Sanaee, S. Mohajerzadeh, M. Araghchini
University of Tehran, IR

Keywords: hollow needles, high precision etching, capacitance behavior, liquid


In this paper we report the realization of record-small hollow needles. The fabrication process does not need a three-dimensional lithography and uses a high precision deep vertical etching in a hydrogenation assisted ion etching unit. The formation of hollow structures is possible using a small angle deposition method. The hollow structures have been employed to realize liquid-included capacitors where a considerable response to external inclinaiton is measured. The capillary force is an unwanted effect in such a structure where liquid-transfer through little holes is desired. By proper using of metal coating we have controlled this effect.
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