Microtech2010 2010

Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy

T. Sulzbach, W. Engl, R. Maier
Nanoworld Services GmbH, DE

Keywords: cantilever, array, AFM, piezoresistor, actuator, tip


Cantilever arrays probes with self-sensing and self-actuating cantilevers and integrated sharp silicon tips for parallel surface scanning were realized. Each cantilever is equipped with a piezoresistive deflection sensor and a thermal bimorph actuator enabling an individual tip-sample distance control which is demonstrated in parallel surface imaging experiments. The probe concept and fabrication is explained as well as the probe characteristics and first application results.
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