Microtech2010 2010

Developing of a miniature resistance type gas sensor by tin dioxide used for hydrogen sulfide detection

B.W. Chang
Hungkuang University, TW

Keywords: hydrogen sulfide, tin dioxide, gold nanoparticle


The purpose of this study used nanostructured SnO2/Au to develop a miniature hydrogen sulfide gas sensor. We used the sol-gel method to synthesis SnO2 which doped with and without Au nanoparticles. Moreover, this developed sensing material was dripped on interdigital electrode by spin-coating method. These semifinished material sensors were calcine at 400℃ to form a porous structure. Compare with pure and Au doped SnO2 sensitivity for hydrogen sulfide detection. In charactering of sensing thin film, X-ray diffraction were used to analyze the composition of SnO2/Au nanocomposites. SEM and TEM images were respectively used to observer the morphology and to quantify the particle size. The result showed that for hydrogen sulfide detection, there have maximum response in SnO2+1Au composites, and was able to detect low concentration was about 0.2 ppm at room temperature. The selectivity of sensors for 1ppm H2S have maximum response and all sensors exhibited low response to 20 ppm SO2, 50 ppm NH3, 1000 ppm CO2 and 20% O2. Then we detect 70% and 99.5% alcohol vapor, the result revealed lower influence with 99.5% alcohol vapor than 70% alcohol vapor. We also studied the effect of humidity (50%, 70% and 80% RH) to H2S detection. The result show influenced with humidity. However, in humid environment have influence of sensor detection, so we need to avoid this condition.
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