Microtech2010 2010

Design Simulations of MEMS Micropump by 3D Fluid-Structure Interaction Analysis

J. Johari
Universiti Teknologi Mara, MY

Keywords: fluid-structure interaction


The major technical impediment in developing new microdevices lies in the lack of understanding physical phenomena and their interactions of thermal, mechanical, electric, magnetic and/or fluidic fields for performing their intended functions. Due to the increasing demands for accuracy, it is not enough to understand these areas individually, but the interactions of different physical phenomena at the same time can no longer be neglected or simplified, but have to be taken into account in detail. This can be made possible by using coupled-field analysis that take into account interactions between two or more different disciplines of engineering. The typical representative in microfluidic systems is an analysis of a piezoelectric micropump as an electro-structure-fluid coupled microsystems. Accurate analysis of fluid-structure interaction of the micropump involves in electro mechanics, solid mechanics and fluid mechanics of the system. A piezoelectric actuated valveless micropump (PAVM) is a complex fluid-structure coupled microsystem consisting of a piezoelectric actuator, silicon membrane, working fluid and micro-diffusers.
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