Microtech2010 2010

Growth of improved ultrathin pristine SnO2 films by electric field modified spray pyrolysis technique

S. Shikha, D.K. Pandya, S.C. Kashyap, S. Chaudhary
IIT Delhi, IN

Keywords: ultra thin tin oxide films, electric field, Spray Pyrolysis


In the present paper, deposition of good quality polycrystalline pristine SnO2 thin films (25-200 nm) at ~ 450C by a modified spray pyrolysis technique is reported.DC electric field is applied during deposition to improve growth kinetics. A comparative study has been carried out on the electrical, structural and optical properties of SnO2 films deposited on a glass substrate with and without electric field. In a typical case, the sheet conductance of 25 nm thick film is enhanced by two orders when deposited in the presence of electric field; and the crystallite size is enhances by nearly 50%. . The application of dc electric field during deposition provides additional driving force for diffusion/surface migration of the pyrolysed species, thereby improving the microstructure and hence physical properties (optical transmission and electrical conductivity). A detailed investigation of the structural, electrical and optical properties of these films will be discussed in this paper.
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