Microtech2010 2010

Advanced nanoscale elastic property measurement by contact-resonance atomic force microscopy

G. Stan, R.F. Cook
National Institute of Standards and Technology, US

Keywords: nanoscale mechanical measurements, dynamic AFM


In the past few years, we have improved and developed the capabilities of CR-AFM in various ways: established clear criteria for assessing the precision and accuracy in CR-AFM measurements, introduced a load-dependent CR-AFM protocol suitable for elastic modulus measurements on compliant materials, and tested the suitability of CR-AFM measurements on various materials with elastic moduli in the range of GPa to hundreds of GPa. We have also extended CR-AFM applicability to quantitative elastic modulus measurements on various one-dimensional nanostructures (nanowires and nanotubes). Another valuable CR-AFM application has been the interrogation of elastic properties at the nanoscale of granular nanocrystalline surfaces and thin films. By combining the CR-AFM point measurements with AFM scanning capability, the elastic modulus was mapped with better than 10 nm spatial resolution. To determine the elastic modulus from CR-AFM measurements on such granular surfaces, both topography and contact stiffness maps were self-consistently correlated.
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