Microtech2010 2010

Novel Light-based Micro-Pressure Sensor

Organization:WORLDiscoveries, Ontario, CA
I.P. Brief:The innovation in the micro-pressure sensor is that it uniquely employs optical waveguide technology coupled with a micromechanical sensing unit that can detect pressure, force or acceleration with high sensitivity. It is developed on the SOI (Silicon-On-Insulator) MEMS (micro-electro-mechanical systems) platform allowing for compatibility and easy integration in commercial applications.
Keywords:Photonic Crystal, MEMS, Pressure Sensor, Lab-on-a-Chip (LOC)
Primary Industry:Sensors & Microsystems

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