Microtech2010 2010

Low-voltage field emission scanning electron microscope

Organization:Swiss federal institute of technology, Zurich (ETH Zurich), Zurich, CH
I.P. Brief:The present IP relates to a cost-efficient electron microscope capable of imaging the top-most layer(s) of surfaces with high spatial resolution as well as to a method of operating such a microscope.
Keywords:scanning electron microscopy, scanning probe microscopy, ultra-high vacuum, low-voltage electron source
Primary Industry:Nanotechnology (microscopy)

Full IP Descriptions available on-site.

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