Microtech2010 2010

Carbon Nanotube Nanoelectronics and Macroelectronics (invited presentation)

C. Zhou
University of Southern California, US

Keywords: Carbon Nanotubes, CNT, Thin film transistors

Abstract:

Carbon nanotubes offer great promise but also face significant challenges for future electronic applications. This talk will focus on our recent work on: 1. Assembly and integration of massive aligned nanotubes for nanoelectronics, 2. Metal tube removal based on light irradiation, and 3. Thin film transistors (TFTs) based on separated nanotubes for macroelectronics. We will report our wafer-scale processing of aligned nanotube electronics. Massive aligned nanotubes were synthesized over complete 4 inch quartz and sapphire substrates, and then transferred to Si/SiO2 substrates. CMOS analogous fabrication was performed to yield submicron high performance transistors and defect-tolerant logic circuits. In addition, we will present the metal-to-semiconductor conversion of carbon nanotubes induced by light irradiation. The light irradiation process is scalable to wafer-size scales and capable of yielding improvements in the channel-current on/off ratio up to 5 orders of magnitude in nanotube-based field-effect transistors. Furthermore, we will report wafer-scale processing of TFTs based on separated nanotube, including key technology components such as assembly of high-density, uniform separated nanotube networks, high-yield fabrication of devices with superior performance, and demonstration of organic light-emitting diode (OLED) control circuit.
 
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