Microtech2010 2010

Optimal Solutions for the TE-Mode Infrared Transmission through the Silver Gratings

C-W Lee, C-H Kuan
National Taiwan University, TW

Keywords: optimal solutions, gratings, infrared,

Abstract:

Ag gratings with various thickness were fabricated by electron beam lithography system and their infrared (2.5~25um) transmission of the transverse electric mode (TE mode) were measured by the Fourier Transform Infrared Spectroscopy. Simulations were used theoretically by the Maxwell equations and the Bloch’s theorem of solid state physics. According to physical concepts, we propose dipole lattice model and over-sized Fourier series expansion method to modify conventional boundary conditions. The simulation curves are very close to experimental results. By our model, we are able to calculate the far field and near field from the interaction between light and gratings very precisely. We could know that how the waves propagate and how to control the spacial distribution of electromagnetic energy in nanostructures.
 
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