Microtech2010 2010

Low-power / High-temperature sensors and MEMS in SOI technology

L. Moreno-Hagelsieb, O. Bulteel, N. André, P. Gerard, J.-P. Raskin, D. Flandre
Université catholique de Louvain / SENSOI, BE

Keywords: biosensor, DNA hybridization, bacteria, capacitive sensors, electrical detection, water quality


Low-power and high-temperature sensors and MEMS designs based on bulk, SOI and IC compatible materials and processes. Target markets are in general public sensors for UV, ozone, CO, liquids presence, e.g. in mobile devices. In transport (automobile, aviation, train), sensors for monitoring their operating conditions, and their actuation, chemical, mechanical and electrical control systems. In health, sensors for the medical diagnosis (DNA, RNA, bacteria, viruses…). For DNA and bacteria detection (IDE Sensor) the Design is ready for integration into micro fluidic system and into diagnosis kits (i.e. immunochromatographie or ELYSA type test). For UV light based detections (UV Diode), that are ready for use, packaging must be customized. Customers are the kits fabricator to integrate our device for a fast electrical measurement, Distributors especially for our UV sensors and industry with needs in electronic miniaturized low-power, wireless or high-temperature sensors for process control, monitoring and data acquisition.
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