Microtech2010 2010

Study on equivalent-circuit model for micro-torsion mirror

K. Matsuda
Tokushima Bunri University, JP

Keywords: equivalent circuit, mirror, micro, actuator

Abstract:

We report an equivalent circuit model for micro-tosion mirror using circuit simulator Qucs and demonstrated mixed simulation between micro mechanics and electrical circuit. In the simulation, electroscatic force, equation of motion, and Kirchhoff’s law are considered. Mathematical operation in the equation of motion is interrupted as an electrical capacitor, so that a seamless multi-physics mixed simulation becomes possible.
 
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