Microtech2010 2010

A Fully Symmetric and Completly Decoupled MEMS-SOI Gyroscope

A. Sharaf, S. Sedky, M. Serry, A. Elshurafa, M. Ashour, S.E.-D. Habib
American University in Cairo, EG

Keywords: micromachined gyroscope, FEA, DRIE, MEMS-SOI


Gyroscopes are sensors that measure rotation rate and are extremely important in many applications such as navigation and vehicle stability control. Despite being manufactured in many technologies in various shapes and sizes, micro-electromechanical (MEMS) gyroscopes are gaining wide acclaim due to the miniaturization advantage, and the potential of integrating the gyroscopes along with the driving and sensing circuitry on the same chip and/or package to increase yield and reduce cost. In this paper, we present a new vibratory, fully symmetric, decoupled gyroscope, along with detailed theoretical analysis. The analytical results are verified with thorough simulations using the commercially available software packages with the Coriolis force receiving particular attention.
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