Microtech2010 2010

Design of a normally closed piezoelectric micro valve

S. Zähringer, M. Menacher, P. Kirchner, N. Schwesinger
Technische Universitaet Muenchen, DE

Keywords: piezoelectric, normally closed, micro valve


In a previously published paper a piezoelectric actuator using surface electrodes was investigated in a macro-microscopic approach. Bases on those results a normally closed piezoelectric micro valve was devoloped. Therefore the electrode structures were minimized and their functionality verified. Various process optimizations steps were investigated. New assembling techniques, using primarly micro contact printing technologies were developed. Because of the new actuation principle a very simple micro valve design could be developed, ommitting the need of passive membrane. Functionality test of the micro valve are currently underway.
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