Microtech2010 2010

Shape Effect on the Reflectance of Sub-Wavelength Structures on Silicon Nitride for Solar Cell Application

K.C. Sahoo, Y. Li, E.Y. Chang
National Chiao Tung University, TW

Keywords: solar cell, sub-wavelength structure, rigorous coupled wave analysis


Sub-wavelength structure (SWS) on anti-reflection coating instead of semiconductor surface can improve the efficiency of silicon solar cell has been studied both numerically and experimentally recently. The shape of the SWS may be somewhat variable and, therefore, a multilayer rigorous coupled-wave approach is advanced to investigate the reflection properties of silicon nitride (Si3N4) SWS for four different shaped SWS, assuming a hexagonal nipple lattice. In this study, we investigate the spectral reflectivity of silicon nitride (Si3N4) sub-wavelength structures (SWS) with different shapes. We vary the height of etched part “s” and the thickness of non-etched layer “h” for four different SWS structures (pyramid, parabola, cone, and cylinder) to examine the lowest effective reflectance.
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