Microtech2010 2010

Electrical Characteristics of 16-nm-Gate Multi-Gate-and-Multi-Fin Devices and Digital Circuits

H-W Cheng
National Chiao Tung University, TW

Keywords: 16-nm, Multi-Gate-and-Multi-Fin Device, modeling, TCAD simulation, electrical characteristics, digital circuit


In this work, we estimate electrical characteristics including threshold voltage (Vth) and gate capacitance (Cg) of 16-nm-gate multi-gate-and-multi-fin FETs, and delay time of an inverter and static noise margin (SNM) of a 6T SRAM. Large-scale random-dopant-induced fluctuations of the aforementioned characteristics are further discussed with respect to different fin aspect ratio (AR = the fin height / the effective fin width), where the device characteristics are obtained by solving a set of 3D density-gradient equations coupled with Poisson equations as well as electron-hole current continuity equations [3] under our parallel computing system [4]. Notably, an experimentally validated simulation [5] is also conducted to investigate the fluctuation property.
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