Microtech2010 2010

Nanofluidic Channel Based Single Molecular Sensors in Polymer Substrate Fabricated by Novel Nanoimprinting Processes

J. Wu, R. Chantiwas, S.C. Soper, S. Park
Louisiana State University, US

Keywords: nanoimprinting, nanochannel, microfluidic device, polymer stamp


One critical challenge in developing innovative nanochannel-based sensors for bio/chemical analyses is to build multiscale structures composed of narrow, long and continuous fluidic nanochannels and microfluidic networks at low cost. We presents a novel process using direct imprinting into polymer substrates to produce the nanofluidic sensor structure for single molecular analysis in a cost-effective way. The key for the process is to use polymer stamps to reduce stress generated during imprinting.
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