Microtech2010 2010

Single-Walled Carbon Nanotube Gas Sensors Integrated on Complementary Metal Oxide Semiconductor circuitry

C.-L. Chen, Y. Liu, V. Agarwal, S. Sonkusale, A. Busnaina, M. Chen, M.R. Dokmeci
Northeastern University, US

Keywords: carbon nanotube sensors, CMOS integration, gas sensors


Carbon nanotubes hold great promise as nanosensors due to their extraordinary electrical and mechanical properties. Single-Walled Carbon Nanotubes (SWNT) are sensitive to various odors and hence various sensors are being explored using these nanomaterials. Furthermore, systems including nanotube sensors are rather challenging and hence rare. Furthermore, the nanotube sensors which require off-chip components are bulky, potentially prone to signal interference from the environment and/or noise along the signal paths demanding integration of nanosensors onto CMOS circuitry. In this work, we report the integration of SWNTs onto functional CMOS circuitry for gas sensing applications. The integration of SWNTs onto CMOS circuitry has potential applications including electronic nose, environmental and health monitoring.
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