Microtech2010 2010

Parylene-C Packaged Single-Walled Carbon Nanotube Thin film Transistors

S. Selvarasah, X. Li, A. Busnaina, M.R. Dokmeci
Northeastern University, US

Keywords: ultra flexible, Parylene-C passivation, thin film transistors, single-walled carbon nanotubes (SWNTs), biocompatible


Carbon nanotubes (CNTs) with their unique chemical, physical and mechanical properties are promising active materials for high performance electronic devices. CNT based flexible electronic devices should be able to handle multiple mechanical cycles of bending and stretching and still maintain their original performance characteristics. In addition, carbon nanotubes with their large surface area to volume ratios are very sensitive to the environmental factors and have been utilized in numerous sensing applications. Despite their utility in sensor applications, CNT based transistors need to be protected from the environment for reliable operation. In this research, we present a flexible single-walled carbon nanotube (SWNT) thin film transistor (TFTs), demonstrate encapsulation of this transistor with a thin layer of parylene-C and evaluate its electrical and mechanical properties before and after passivation. We also conduct cyclical mechanical tests to evaluate their flexibility and robustness.
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